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Description:
This scanning electron
microscope image shows a row of mirrors 60, 79, 80, and 90 microns
long in its final position after being released from the substrate. |
Source:
Adaptive Communications Research
(ATR) Laboratories |
Story: Micromachine
parts relax into place
TRN June 27, 2001 |
TRN Categories:
Microelectromechanical Systems;
Materials Science and Engineering
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Form:
Still |
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